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半导体制造用残留气体分析仪

Semiconductor manufacturing is a complex and specialized process with numerous applications for precision gas and pressure control. Learn more about how Clippard's engineering team combined our DR-2 regulator and analytical valve with a special manifold to create a precision flow controller that solved a unique challenge.

VIDEO TRANSCRIPT:

The manufacturing of semiconductors is a complex and specialized process with numerous applications for precision pressure and flow control. One specific device used in semiconductor manufacturing is a residual gas analyzer. In this application, harsh chemicals are pumped into the device, with numerous sensors used to monitor the process.

A semiconductor manufacturer was facing a big challenge with premature pump failure. The harsh media was degrading the bearings inside the pumps. To address this issue, they devised a solution to install a device that would create a nitrogen blanket around the pump bearings—thus preventing the media from damaging the bearings. However, size, weight, and cost made implementing this solution challenging. That’s when they reached out to Clippard for assistance.

We developed a solution that utilized a precision DR-2 mechanical regulator and an analytical valve with a specific orifice inside to create a precision flow controller. Both products were combined in a small manifold, and we calibrated them to ensure every assembly would maintain the nitrogen blanket and protect the pump bearings.

The accuracy of the DR-2 mechanical regulator allowed the customer to choose a smaller, more cost-effective option to control the pressure flowing through the fixed orifice. The result was a precision flow controller that could be controlled with a simple analog signal open and close the valve. Clippard’s ability to precisely tune the controller to the customer’s exact flow requirements solved the problem and created a long-lasting, robust solution.

Clippard has the expertise and value-added solutions to meet your application needs. If you need assistance with a challenging application, please give us a call.

视频介绍:


半导体制造是一个复杂而专业的过程,在精密压力和流量控制方面有许多应用。 一种用于半导体制造的特定设备是残留气体分析仪。 在此应用中,将刺激性化学物质泵入设备,并使用大量传感器来监控该过程。


一家半导体制造商面临泵过早故障的巨大挑战。 恶劣的介质正在降低泵内的轴承。 为了解决这个问题,他们设计了一种解决方案,即安装一个设备,在泵轴承周围形成一层氮气层,从而防止介质损坏轴承。 然而,尺寸、重量和成本使得实施该解决方案具有挑战性。 就在那时,他们向 Clippard 寻求帮助。


我们开发了一种解决方案,利用精密 DR-2 机械调节器和内部带有特定孔口的分析阀来创建精密流量控制器。 这两种产品组合在一个小型歧管中,我们对它们进行了校准,以确保每个组件都能保持氮气保护层并保护泵轴承。


DR-2 机械调节器的精度允许客户选择更小、更具成本效益的选项来控制流经固定节流孔的压力。 其结果是一个精密流量控制器,可以通过一个简单的模拟信号来控制阀门的打开和关闭。 Clippard 能够根据客户的确切流量要求精确调整控制器,解决了这个问题,并创建了一个持久、稳健的解决方案。


Clippard 拥有满足您应用需求的专业知识和增值解决方案。 如果您在具有挑战性的应用程序方面需要帮助,请致电我们。



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